Metalorganic Vapour Phase Epitaxy
Metalorganic Vapour Phase Epitaxy- is a method of creating controllable epitaxial layered structures by atomic deposition over a substrate material. A substrate wafer is placed on a graphite susceptor and heated in a reaction vessel. Compounds are grown in a hydrogen atmosphere and then form epitaxial layers on the substrate as they decompose.
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| Cite as | "Metalorganic Vapour Phase Epitaxy". Appropedia. 2008–2026. Retrieved June 4, 2026. |